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Optical Engineering

Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes
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Paper Abstract

The major problem of measurement of a power spectral density (PSD) distribution of surface heights with surface profilometers arises due to the unknown modulation transfer function (MTF) of the instruments, which tends to distort the PSD at higher spatial frequencies. The special mathematical properties of binary pseudo-random patterns make them an ideal basis for developing MTF calibration test surfaces. Two-dimensional binary pseudo-random arrays have been fabricated and used for the MTF calibration of the MicroMapTM-570 interferometric microscope with all available objectives. An investigation into the effects of fabrication imperfections on the quality of the MTF calibration and a procedure for accounting for such imperfections are presented.

Paper Details

Date Published: 1 May 2010
PDF: 9 pages
Opt. Eng. 49(5) 053606 doi: 10.1117/1.3431659
Published in: Optical Engineering Volume 49, Issue 5
Show Author Affiliations
Samuel K. Barber, Lawrence Berkeley National Lab. (United States)
Erik H. Anderson, Lawrence Berkeley National Lab. (United States)
Rossana Cambie, Lawrence Berkeley National Lab. (United States)
Stefano Marchesini, Lawrence Berkeley National Lab. (United States)
Wayne R. McKinney, Lawrence Berkeley National Lab. (United States)
Peter Z. Takacs, Brookhaven National Lab. (United States)
Dmitry L. Vorornov, Kharkiv Polytechnic Institute (Ukraine)
Valeriy Yashchuk, Lawrence Berkeley National Lab. (United States)

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