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Journal of Nanophotonics • Open Access

Commentary: Multichannel ellipsometry for monitoring processes
Author(s): Ilsin An

Paper Abstract

This PDF contains the commentary "Multichannel ellipsometry for monitoring processes."

Paper Details

Date Published: 1 March 2010
PDF: 4 pages
J. Nanophoton. 4(1) 040302 doi: 10.1117/1.3374056
Published in: Journal of Nanophotonics Volume 4, Issue 1
Show Author Affiliations
Ilsin An, Hanyang Univ. (Korea, Republic of)

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