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Optical Engineering

Common-path two-wavelength interferometer with submicron precision for profile measurements in on-line applications
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Paper Abstract

We propose a common-path two-wavelength interferometric system based on a single optical element, a Savart plate, that is able to obtain single-shot profile measurements with submicron precision from safe working distances (beyond 100 mm). These characteristics make this sensor ideal for surface inspection in on-line applications. For the illumination branch, two lasers with close wavelengths are combined and then passed through a rotating holographic diffuser for drastic speckle reduction. In the acquisition branch, the interferometric signals of both wavelengths are captured simultaneously by a camera, and their phase signals are combined to extend the measurement range.

Paper Details

Date Published: 1 February 2010
PDF: 8 pages
Opt. Eng. 49(2) 023602 doi: 10.1117/1.3321709
Published in: Optical Engineering Volume 49, Issue 2
Show Author Affiliations
José Maria Enguita, Univ. de Oviedo (Spain)
Ignacio Álvarez, Univ. de Oviedo (Spain)
María Frade Rodriguez, Univ. de Oviedo (Spain)
Jorge Marina

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