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Journal of Micro/Nanolithography, MEMS, and MOEMS

Design and low-temperature cofired ceramic fabrication of a novel vibration-induced electromagnetic microgenerator with enhanced power output
Author(s): Y. M. Hwang; W. L. Lu; C.T. Pan
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Paper Abstract

We present a novel vibration-induced electromagnetic microgenerator with enhanced power output, which uses a unique inducer made of multilayer silver (Ag) coils and a magnet with a neodymium-iron-boron (NdFeB) central core. The device converts mechanical power into electric power using electromagnetic induction that arises from relative motion between the magnet and the vibrating induction coil. The Ag coils are combined with the ceramic microspring to build the inducer. The configuration of magnets is chosen such that the magnetic field in the radial direction for electromotive force is perpendicular to the velocity vector within the vibrating induction coil. Ansoft Maxwell (Pittsburgh, Pennsylvania) modal analysis is used to predict the magnetic field. In this work, the manufacturing technology of multilayer Ag coils of low temperature cofired ceramic (LTCC) is first used and feasible for the fabrication of vibration-induced electromagnetic devices. The experimental results produce a maximum electromotive force of 25.19 mV and a power output of 1 mW at a frequency of 120 Hz and amplitude of 0.03 mm. The volumetric and mass power densities per frequency are found to be 1.97×10−2 mW/cm3·Hz and 314 mW/Kg·Hz. The new design mechanism has been build and is valid for power output.

Paper Details

Date Published: 1 January 2010
PDF: 11 pages
J. Micro/Nanolith. 9(1) 013052 doi: 10.1117/1.3316406
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 1
Show Author Affiliations
Y. M. Hwang, National Sun Yat-Sen Univ. (Taiwan)
W. L. Lu, National Sun Yat-Sen Univ. (Taiwan)
C.T. Pan, National Cheng Kung Univ. (Taiwan)

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