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Journal of Micro/Nanolithography, MEMS, and MOEMS

Fine-pitch high-efficiency spatial optical modulator for mobile display applications
Author(s): Jong Hyeong Song; Sang Kyeong Yun; Hee-Yeoun Kim; Seungdo An; Heung-Woo Park; Yoon Joon Choi; Victor Yurlov; Anatoly Stepanovych Lapchuk; Chung Mo Yang; Sung Jun Lee; Jae Wook Jang; Ki Un Lee; Ki Suk Woo; El Mostafa Bourim
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Paper Abstract

Diffractive spatial optical modulators (SOM) employing a fine-pitch pixel array were introduced. The micromechanical designs of the lead zirconate titanate (PZT) actuator and mirror ribbon structure were optimized for a small volume while maintaining the same level of performance. The same design rule and fabrication equipment were used for a new 10-µm-pitch and conventional 16-µm-pitch SOM. The optical efficiency of the new SOM was 78% (zeroth-order diffraction), which is an improvement over that of the 16-µm-pitch SOM (73%). The full on/off contrast ratio showed no differences, and a high displacement of 500 nm was achieved. The stress of the Pt/PZT/Pt actuating layer was the main parameter affecting the initial gap height and displacement of the ribbon. The required ribbon flatness could be achieved by applying a stress gradient on the SiN layer. The temperature-sensitive characteristics, which degrade image quality, could be minimized by a mechanical compensation method that takes advantage of the thermal expansion effect of Si substrates. The estimated lifetime of the device is >4000 h. The developed fine-pitch SOM device has sufficient response time and ribbon displacement to be suitable for high-quality embedded laser-projection displays. The VGA optical module was successfully demonstrated in a mobile laser projection display.

Paper Details

Date Published: 1 January 2010
PDF: 8 pages
J. Micro/Nanolith. 9(1) 013026 doi: 10.1117/1.3309711
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 1
Show Author Affiliations
Jong Hyeong Song, Samsung Electro-Mechanics (Korea, Republic of)
Sang Kyeong Yun, Samsung Electro-Mechanics (Korea, Republic of)
Hee-Yeoun Kim, Samsung Electro-Mechanics (Korea, Republic of)
Seungdo An, Samsung Electro-Mechanics (Korea, Republic of)
Heung-Woo Park, Samsung Electro-Mechanics (Korea, Republic of)
Yoon Joon Choi, Samsung Electro-Mechanics (Korea, Republic of)
Victor Yurlov, Samsung Electro-Mechanics (Korea, Republic of)
Anatoly Stepanovych Lapchuk, Samsung Electro-Mechanics (Korea, Republic of)
Chung Mo Yang, Samsung Electro-Mechanics (Korea, Republic of)
Sung Jun Lee, Samsung Electro-Mechanics (Korea, Republic of)
Jae Wook Jang, Samsung Electro-Mechanics (Korea, Republic of)
Ki Un Lee, Samsung Electro-Mechanics (Korea, Republic of)
Ki Suk Woo, Samsung Electro-Mechanics (Korea, Republic of)
El Mostafa Bourim, Samsung Electro-Mechanics (Korea, Republic of)


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