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Optical Engineering

Novel high sensitivity accelerometer based on a microfiber loop resonator
Author(s): Chang-Lun Hou; Yu Wu; Xu Zeng; Shuangshuang Zhao; Qiaofen Zhou; Guoguang Yang
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Paper Abstract

An optical accelerometer with a bulk-micromachined silicon proof mass and a microfiber loop resonator (MLR) sensor was developed. The MLR was fixed on the surface of the cantilever beam. The proof mass and cantilever beam were fabricated with a two-mask process. An accelerometer with a range of ±20 g and output sensitivity 624.7 mV/g was fabricated. The design, simulation, fabrication, and preliminary results are presented.

Paper Details

Date Published: 1 January 2010
PDF: 6 pages
Opt. Eng. 49(1) 014402 doi: 10.1117/1.3294883
Published in: Optical Engineering Volume 49, Issue 1
Show Author Affiliations
Chang-Lun Hou, Zhejiang Univ. (China)
Yu Wu, Univ. of Electronic Science and Technology of China (China)
Xu Zeng, Zhejiang Univ. (China)
Shuangshuang Zhao, Zhejiang Univ. (China)
Qiaofen Zhou, Zhejiang Univ. (China)
Guoguang Yang, Zhejiang Univ. (China)


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