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Optical Engineering

Fabrication of a reusable microlens array for laser-based structuring
Author(s): Claire O'Connell; Richard J. Sherlock; Thomas J. Glynn
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Paper Abstract

A microlens array optic was fabricated for laser surface microstructuring of polymer surfaces. The optic contains a hexagonal close-packed monolayer of SiO2 microspheres, held together by an adhesive substance and supported on fused silica glass. The array is placed in direct contact with the target substrate and is exposed to UV light at a wavelength of 193 nm. During this exposure, the SiO2 spheres act as microlenses, which focus the incoming laser light, but also enhance the optical near-field intensity underneath each microsphere. A large number of identical structures are produced simultaneously using this type of direct laser ablation, which leads to a highly efficient process. The ablated holes are approximately 1.8 μm in diameter, with a pitch of 8.4 μm and a depth of 80 nm. This microlens array has many advantages over other types of array, including the fact that it is inexpensive and easy to fabricate. An important feature is that it can transmit light at a wavelength less than 300 nm, which makes it suitable for laser surface patterning.

Paper Details

Date Published: 1 January 2010
PDF: 4 pages
Opt. Eng. 49(1) 014201 doi: 10.1117/1.3281665
Published in: Optical Engineering Volume 49, Issue 1
Show Author Affiliations
Claire O'Connell, National Univ. of Ireland, Galway (Ireland)
Richard J. Sherlock, National Univ. of Ireland, Galway (Ireland)
Thomas J. Glynn, National Univ. of Ireland, Galway (Ireland)

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