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Journal of Micro/Nanolithography, MEMS, and MOEMS

Fabrication and testing of surface ratchets primed with hydrophobic parylene and hexamethyldisilazane for transporting droplets
Author(s): Yung-Chiang Chung; Guo-Yuan Hess; Fu-Wen Yeh; Hsieh-Cheng Han; Chien-Yuan Chen; Ching-Jiun Lee; Horn-Jiunn Sheen; Lung Jieh Yang
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Paper Abstract

We demonstrate a way to transport droplets by an arrowed micropillar array surface with hydrophobic parylene. The lightly hydrophilic parylene surface could be changed to hydrophobic one by treating with fluorine-based plasma (CF4 or SF6). The droplet on this hydrophobic parylene surface with arrowed ratchets could be transported by a speaker, and the average measured velocity was 29 mm/s. Moreover, the authors compared driving performance of the parylene surface ratchets with the ones modified by the hexamethyldisilazane (HMDS) vapor. Both the results of using hydrophobic parylene and HMDS were better than the previous work.

Paper Details

Date Published: 1 January 2010
PDF: 9 pages
J. Micro/Nanolith. 9(1) 013035 doi: 10.1117/1.3280261
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 1
Show Author Affiliations
Yung-Chiang Chung, Ming Chi Univ. of Technology (Taiwan)
Guo-Yuan Hess, Tamkang Univ. (Taiwan)
Fu-Wen Yeh, Tamkang Univ. (Taiwan)
Hsieh-Cheng Han, National Taiwan Univ. (Taiwan)
Chien-Yuan Chen, National Taiwan Univ. (Taiwan)
Ching-Jiun Lee, National Taiwan Univ. (Taiwan)
Horn-Jiunn Sheen, National Taiwan Univ. (Taiwan)
Lung Jieh Yang, Tamkang Univ. (Taiwan)


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