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Journal of Micro/Nanolithography, MEMS, and MOEMS

Fabrication of giant magneto resistance sensing devices with vertically grown Co/Cu nanowires on a substrate
Author(s): Thong C. Le; Hargsoon Yoon; Linfeng Chen; Roy McCann; Vijay K. Varadan
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Paper Abstract

We describe the fabrication and analysis of a giant magneto resistance (GMR) sensing device with multilayered magnetic nanowires containing alternating ferromagnetic and nonmagnetic layers on a silicon substrate. Multilayered nanowires with Co and Cu layers were vertically grown using pulsed electrochemical deposition to control the periodic structure of nanolayers in a nanopore template. Lithography-assisted template bonding (LATB) was applied to attach a polymer nanopore membrane and grow nanowires on silicon and polyimide substrates. For magnetic field sensing, the multilayered nanowires were electrically connected to top and bottom electrodes by overgrowing nanowires, and low contact resistance values of GMR sensing devices were achieved. The GMR effect was measured with magnetic field changes perpendicular and parallel to the axis of the nanowires. This simple fabrication process is highly favorable for the development of nanoscale electronics with magnetic nanowires at low cost and would offer large design flexibility.

Paper Details

Date Published: 1 October 2009
PDF: 8 pages
J. Micro/Nanolith. 8(4) 043055 doi: 10.1117/1.3273963
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 4
Show Author Affiliations
Thong C. Le, Univ. of Arkansas (United States)
Hargsoon Yoon, Univ. of Arkansas (United States)
Linfeng Chen, Univ. of Arkansas (United States)
Roy McCann, Univ. of Arkansas (United States)
Vijay K. Varadan, Univ. of Arkansas (United States)

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