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Journal of Micro/Nanolithography, MEMS, and MOEMS

Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology
Author(s): Satoshi Amaya; Dzung Viet Dao; Susumu Sugiyama
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Paper Abstract

We report the fabrication and evaluation of a PMMA electrostatic comb-drive microactuator using hot embossing and ultra-precision cutting technology. First, a two-step silicon mold is fabricated by bulk micromachining technology. Next, comb-drive microactuator structures are formed on a PMMA plate by hot embossing. Both finger width and gap between fingers are 5 µm, and finger thickness is larger than 70 µm. Then, the PMMA layer that remained after hot embossing is removed by ultra-precision cutting to release the movable parts. Last, the device is coated with a gold layer for the electrode. The PMMA comb-drive microactuator has been tested successfully.

Paper Details

Date Published: 1 October 2009
PDF: 5 pages
J. Micro/Nanolith. 8(4) 043065 doi: 10.1117/1.3268366
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 4
Show Author Affiliations
Satoshi Amaya, TOWA Corp. (Japan)
Dzung Viet Dao, Ritsumeikan Univ. (Japan)
Susumu Sugiyama, Ritsumeikan Univ. (Japan)

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