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Journal of Micro/Nanolithography, MEMS, and MOEMS

Gap regulation for suspended rotating disk used for microgyroscopes
Author(s): Nan-Chyuan Tsai; Bing-Hong Liou; Chih-Che Lin
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Paper Abstract

An innovative magnetic module that is concurrently capable of performing as an actuator and a sensor is proposed and analyzed. The magnetic module is basically similar to a microscale linear variable differential transformer (LVDT), which is employed to actively adjust the height of a rotating seismic disk used in a gyroscope so that the pitch rate induced by Coriolis effect, due to exerted angular excitation, can be accurately measured. On one hand, the micromagnetic module acts like an actuator for height regulation on the seismic proof mass by applying appropriate electric current to the primary winding of the LVDT unit. On the other hand, the secondary winding pair of the LVDT acts like a sensor that can detect the gap change between the seismic rotating disk and the micromagnetic LVDT module, and the rotation speed (i.e., frequency) by the induced current.

Paper Details

Date Published: 1 October 2009
PDF: 8 pages
J. Micro/Nanolith. 8(4) 043045 doi: 10.1117/1.3256005
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 4
Show Author Affiliations
Nan-Chyuan Tsai, National Cheng Kung Univ. (Taiwan)
Bing-Hong Liou, National Cheng Kung Univ. (Taiwan)
Chih-Che Lin, National Cheng Kung Univ. (Taiwan)


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