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Journal of Micro/Nanolithography, MEMS, and MOEMS

In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing
Author(s): Changsoo Jang; Arindam Goswami; Bongtae Han; Suk-Jin Ham
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Paper Abstract

A novel inverse approach is proposed for in situ measurement of gas diffusion properties of polymeric seals used in microelectromechanical systems (MEMS) packages. The cavity pressure evolution of a polymer-sealed MEMS package subjected to a constant bombing pressure is documented as a function of time using classical interferometry, and the diffusion properties of the polymeric seal are subsequently determined from the measured pressure history. A comprehensive numerical procedure for the inverse analysis is established considering three diffusion regimes that characterize the leak behavior through a polymeric seal. The method is implemented to determine the helium diffusivity and solubility of a polymeric seal.

Paper Details

Date Published: 1 October 2009
PDF: 9 pages
J. Micro/Nanolith. 8(4) 043025 doi: 10.1117/1.3227904
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 4
Show Author Affiliations
Changsoo Jang, Univ. of Maryland (United States)
Arindam Goswami, Univ. of Maryland, College Park (United States)
Bongtae Han, Univ. of Maryland, College Park (United States)
Suk-Jin Ham, Samsung Electro-Mechanics (Korea, Republic of)


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