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Journal of Micro/Nanolithography, MEMS, and MOEMS

Aerial image back propagation with two-dimensional transmission cross coefficient
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Paper Abstract

We present the basic concept of a fast mask optimization method that utilizes target-intensity back propagation. This method decomposes the target-intensity using a two-dimensional (2-D) transmission cross coefficient. After applying normal incidence approximation to the decomposed target intensity, the spectrum of the mask is optimized in the pupil plane. Since the optimization is performed in the pupil plane, one can use relatively small sampling points, leading to a fast optimization. By setting a high-contrast target intensity, we can obtain an approximation of a phase shifting mask, whereas a low-contrast target intensity approximates a binary intensity mask or attenuated phase shifting mask.

Paper Details

Date Published: 1 July 2009
PDF: 7 pages
J. Micro/Nanolith. 8(3) 031406 doi: 10.1117/1.3206980
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 3
Show Author Affiliations
Kenji Yamazoe, Canon U.S.A., Inc. (United States)
Yoshiyuki Sekine, Canon Inc. (Japan)
Tokuyuki Honda, Canon Inc. (Japan)


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