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Journal of Micro/Nanolithography, MEMS, and MOEMS

Electric and magnetic field effects on the magnetostrictive thin film for MEMS
Author(s): Heung-Shik Lee; Chongdu Cho; Dae-Seok Shin; Sung Pil Chang
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Paper Abstract

We present the control of magnetostriction and magnetization of the magnetostrictive thin film via additional electric field with original low magnetic field for microelectromechanical systems (MEMS) application. To examine the electric field effect on the magnetostrictive thin film deposited on each substrate, Si and polyimide (Kapton, Dupont Corp.) substrates are used. During the measurement of magnetization and magnetostriction, 0-to 50-V electric fields are applied under 0.5-T magnetic fields. As a result, 3% of magnetostriction is enhanced compare with no electric field.

Paper Details

Date Published: 1 July 2009
PDF: 4 pages
J. Micro/Nanolith. 8(3) 039701 doi: 10.1117/1.3196431
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 3
Show Author Affiliations
Heung-Shik Lee, Inha Univ. (Korea, Republic of)
Chongdu Cho, Inha Univ. (Korea, Republic of)
Dae-Seok Shin, Inha Univ. (Korea, Republic of)
Sung Pil Chang, Inha Univ. (Korea, Republic of)

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