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Optical Engineering

Submicroradian laser beam angular scan precision measurement by interference method
Author(s): Jianfeng Sun; Liren Liu; Anhu Li; Deyan Xu
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Paper Abstract

Laser beam angular scan accuracy measurement plays an important role in many fields. A sub-microradian laser beam scan precision measurement method that utilizes the wavefront interference method with a Zygo interferometer is proposed. The experimental results show that the measurement accuracy is approximately 0.04 μrad, and the new method is very effective and feasible.

Paper Details

Date Published: 1 July 2009
PDF: 5 pages
Opt. Eng. 48(7) 073607 doi: 10.1117/1.3183943
Published in: Optical Engineering Volume 48, Issue 7
Show Author Affiliations
Jianfeng Sun, Shanghai Institute of Optics and Fine Mechanics (China)
Liren Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Anhu Li, Tongji Univ. (China)
Deyan Xu, Shanghai Institute of Optics and Fine Mechanics (China)

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