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Optical Engineering

Fabrication of three-dimensional photonic crystals using autocloning layers on the self-assembled microspheres
Author(s): Te-Hung Chang; Sheng-Hui Chen; Chia-Hua Chan; Yu-Wen Yeh; Shih-Liang Ku; Cheng-Chung Lee; Chii-Chang Chen; Chao-Chun Huang
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Paper Abstract

A novel technique was proposed to fabricate a three-dimensional photonic crystal by self-assembling microspheres and the autocloning technology. The autocloning thin-film layers were superimposed on the prepared two-dimensional structural substrates using self-assembled microspheres. The thin-film process allows the three-dimensional periodic structure to be easily modified in the thickness dimension to structure as needed. We analyzed the etching effect using the unified process model according to the surface movement and surface velocity of the film to achieve the surface profile of the SiO2 adjusting layer. Finally, 17 layers of Ta2O5/SiO2 multilayers were stacked on the SiO2 adjusting layer successfully.

Paper Details

Date Published: 1 July 2009
PDF: 5 pages
Opt. Eng. 48(7) 073401 doi: 10.1117/1.3183906
Published in: Optical Engineering Volume 48, Issue 7
Show Author Affiliations
Te-Hung Chang, National Central Univ. (Taiwan)
Sheng-Hui Chen, National Central Univ. (Taiwan)
Chia-Hua Chan, National Central Univ. (Taiwan)
Yu-Wen Yeh, National Central Univ. (Taiwan)
Shih-Liang Ku, Chung-Shan Institute of Science and Technology (Taiwan)
Cheng-Chung Lee, National Central Univ. (Taiwan)
Chii-Chang Chen, National Central Univ. (Taiwan)
Chao-Chun Huang, Chung-Shan Institute of Science and Technology (Taiwan)

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