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Journal of Micro/Nanolithography, MEMS, and MOEMS

4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging
Author(s): Steven A. Cornelissen; Paul A. Bierden; Thomas G. Bifano; Charlie Lam V. Lam
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Paper Abstract

We present the progress in the development of a 4096-element microelectromechanical systems (MEMS) deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4 µm of stroke, a surface finish of <10 nm rms, a fill factor of 99.5%, and a bandwidth of >5 kHz. The packaging and high-speed drive electronics for this device, capable of frame rates of 22 kHz, are also presented.

Paper Details

Date Published: 1 July 2009
PDF: 8 pages
J. Micro/Nanolith. 8(3) 031308 doi: 10.1117/1.3158067
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 3
Show Author Affiliations
Steven A. Cornelissen, Boston Micromachines Corp. (United States)
Paul A. Bierden, Boston Micromachines Corp. (United States)
Thomas G. Bifano, Boston Univ. (United States)
Charlie Lam V. Lam, Boston Micromachines Corp. (United States)


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