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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Guest Editorial: Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS
Author(s): Yu-Cheng Lin

Paper Details

Date Published: 1 April 2009
PDF: 1 pages
J. Micro/Nanolith. 8(2) 021101 doi: 10.1117/1.3155403
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 2
Show Author Affiliations
Yu-Cheng Lin, National Cheng Kung Univ. (Taiwan)


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