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Optical Engineering

Computer-generated hologram cavity interferometry test for large x-ray mirror mandrels: design
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Paper Abstract

A glancing-incidence interferometric test for large x-ray mirror mandrels, using two computer-generated holograms (CGHs), is described. The two CGHs are used to form a double-pass glancing-incidence system. One layout of the CGH-cavity glancing-incidence interferometer is studied and factors relating to its design are analyzed. A semianalytical expression for the phase function is derived that avoids high-order ripple errors and improves the efficiency of the CGH pattern generation. A system of coarse and fine fiducials for establishing the CGH-cavity and aligning the tested mandrel is discussed. Compared with traditional measurement devices, such as coordinate measuring machines (CMMs) or other scanning metrology systems, the CGH-cavity glancing-incidence interferometer can measure a mandrel surface without mechanical contact, at a high spatial sampling frequency, with lower uncertainty, and at high speed.

Paper Details

Date Published: 1 June 2009
PDF: 11 pages
Opt. Eng. 48(6) 063602 doi: 10.1117/1.3153303
Published in: Optical Engineering Volume 48, Issue 6
Show Author Affiliations
Guangjun Gao, National Institute of Standards and Technology (United States)
John P. Lehan, Univ. of Maryland, Baltimore County (United States)
William W. Zhang, NASA Goddard Space Flight Ctr. (United States)
Ulf Griesmann, National Institute of Standards and Technology (United States)
Johannes Soons, National Institute of Standards and Technology (United States)

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