Share Email Print
cover

Journal of Micro/Nanolithography, MEMS, and MOEMS

Silicon carbide resonant tuning fork for microsensing applications in high-temperature and high G-shock environments
Author(s): David R. Myers; Kan Bun Cheng; Babak Jamshidi; Robert G. Azevedo; Debbie G. Senesky; Li Chen; Mehran Mehregany; Muthu B.J. Wijesundara; Albert P. Pisano
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We present the fabrication and testing of a silicon carbide balanced mass double-ended tuning fork that survives harsh environments without compromising the device strain sensitivity and resolution bandwidth. The device features a material stack that survives corrosive environments and enables high-temperature operation. To perform high-temperature testing, a specialized setup was constructed that allows the tuning fork to be characterized using traditional silicon electronics. The tuning fork has been operated at 600°C in the presence of dry steam for short durations. This tuning fork has also been tested to 64,000 G using a hard-launch, soft-catch shock implemented with a light gas gun. However, the device still has a strain sensitivity of 66 Hz/µε and strain resolution of 0.045 µε in a 10-kHz bandwidth. As such, this balanced-mass double-ended tuning fork can be used to create a variety of different sensors including strain gauges, accelerometers, gyroscopes, and pressure transducers. Given the adaptable fabrication process flow, this device could be useful to microelectromechanical systems (MEMS) designers creating sensors for a variety of different applications.

Paper Details

Date Published: 1 April 2009
PDF: 7 pages
J. Micro/Nanolith. 8(2) 021116 doi: 10.1117/1.3143192
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 2
Show Author Affiliations
David R. Myers, Univ. of California, Berkeley (United States)
Kan Bun Cheng, Univ. of California, Berkeley (United States)
Babak Jamshidi, Univ. of California, Berkeley (United States)
Robert G. Azevedo, Univ. of California, Berkeley (United States)
Debbie G. Senesky, Univ. of California, Berkeley (United States)
Li Chen, Case Western Reserve Univ. (United States)
Mehran Mehregany, Case Western Reserve Univ. (United States)
Muthu B.J. Wijesundara, Univ. of California, Berkeley (United States)
Albert P. Pisano, Univ. of California, Berkeley (United States)


© SPIE. Terms of Use
Back to Top