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Journal of Micro/Nanolithography, MEMS, and MOEMS

Polymer microreplication using ultrasonic vibration energy
Author(s): Hyun Woo Yu; Chi Hoon Lee; Phill Gu Jung; Bosung Shin; Joon-Ho Kim; Kyu-Youn Kwang; Jong Soo Ko
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Paper Abstract

Polymethyl methacrylate (PMMA) microstructures were fabricated by a polymeric microreplication technology using ultrasonic vibration energy. A commercial ultrasonic welder system was used to apply ultrasonic vibration energy for micromolding. Two different types of nickel micromolds, which were equipped with pillar-type and pore-type microstructures, were fabricated. PMMA was used as the polymer microreplication material, and the optimal molding times were determined to be 2 s and 2.5 s for the pillar-type and pore-type micromolds, respectively. Compared with conventional polymer microreplication technologies, the proposed ultrasonic microreplication technology showed an extremely short processing time. Heat energy generated by ultrasonic vibration locally affected the vicinity of the contact area between the micromold and the polymer substrate. Consequently, only that very limited area was melted so that the bulk material was not seriously affected by the thermal effect and thermal shrinkage could be minimized. Furthermore, although the replication process was not performed in vacuum conditions, the ultrasonic micromolding showed high fidelity in polymer microreplication using the pore-type micromold.

Paper Details

Date Published: 1 April 2009
PDF: 7 pages
J. Micro/Nanolith. 8(2) 021113 doi: 10.1117/1.3129824
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 2
Show Author Affiliations
Hyun Woo Yu, Pusan National Univ. (Korea, Republic of)
Chi Hoon Lee, Pusan National Univ. (Korea, Republic of)
Phill Gu Jung, Pusan National Univ. (Korea, Republic of)
Bosung Shin, Pusan National Univ. (Korea, Republic of)
Joon-Ho Kim, Samsung Advanced Institute of Technology (Korea, Republic of)
Kyu-Youn Kwang, Samsung Advanced Institute of Technology (Korea, Republic of)
Jong Soo Ko, Pusan National Univ. (Korea, Republic of)


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