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Journal of Micro/Nanolithography, MEMS, and MOEMS

Integrated microgiant electrorheological fluid valves for microflow cytometry
Author(s): Yun-Yang Ling; Yechi Zhang; Weijia Wen; Patrick Tabeling; Yi-Kuen Lee
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Paper Abstract

We present the fabrication and optimization of new integrated microgiant electrorheological (GER) valves for microflow cytometry. Compared to previous GER valves, new GER valves, consisting of an SU-8 layer, a PDMS membrane, and glass layers, were fabricated by 4-mask microelectromechanical systems technology and two new packaging methods. This design enabled good bonding and fluidic interconnection. The thickness of the PDMS membrane was designed such that the membrane deformation was large enough that the cytometry channel was well sealed. The interfacial stress between the PDMS and the PDMS/SU-8 as a function of vacuum plasma treatment time was investigated in detail. The switching behavior of the GER valves was also analyzed and characterized using fluorescence microscopy.

Paper Details

Date Published: 1 April 2009
PDF: 7 pages
J. Micro/Nanolith. 8(2) 021103 doi: 10.1117/1.3124191
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 2
Show Author Affiliations
Yun-Yang Ling, Hong Kong Univ. of Science and Technology (Hong Kong, China)
Yechi Zhang, Hong Kong Univ. of Science and Technology (Hong Kong, China)
Weijia Wen, Hong Kong Univ. of Science and Technology (Hong Kong, China)
Patrick Tabeling, Ecole Supérieure de Physique et de Chimie Industrielles (France)
Yi-Kuen Lee, Hong Kong Univ. of Science and Technology (Hong Kong, China)


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