Share Email Print
cover

Journal of Micro/Nanolithography, MEMS, and MOEMS

Experiments and results of the silicon micromachined gyroscope
Author(s): Fu-Xue Zhang; Qing-Wen Yan; Wei Zhang
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We report a multifunctional silicon micromachined gyroscope. The gyroscope can sense the rolling, yawing, and pitching angular velocity synchronously. Both the principle and the experiment of the gyroscope are presented to explain the multifunction. We also discuss the way to determine the deflecting direction and deflecting position of the rotating carrier in the gravitation field.

Paper Details

Date Published: 1 April 2009
PDF: 6 pages
J. Micro/Nanolith. 8(2) 021130 doi: 10.1117/1.3122366
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 2
Show Author Affiliations
Fu-Xue Zhang, Beijing Information Science and Technology Univ. (China)
Qing-Wen Yan, Beijing Information Science and Technology Univ. (China)
Wei Zhang, Beijing Univ. of Posts and Telecommunications (China)


© SPIE. Terms of Use
Back to Top