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Journal of Micro/Nanolithography, MEMS, and MOEMS

Vertical electrothermal actuator with separated metal and nitride structural layers
Author(s): Jui-Che Tsai; Ren-Jie Lai; Chun-Yi Yin; Dian-Sheng Chen; Ching-Kai Shen; Yao-Tien Chang
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Paper Abstract

We report on a novel low-power, large-displacement, vertical electrothermal actuator made of multiple materials, primarily silicon nitride, polysilicon, and nickel. The architecture of separated metal and nitride layers bypasses the limitation imposed by conventional bimorph actuators. A vertical tip displacement of 20 µm can be achieved at a driving current as low as 1.06 mA. The corresponding power consumption is 16.29 mW. Devices with different combinations of parameter values are characterized and compared. At the end of the work, we compare our device with several selections from the archives.

Paper Details

Date Published: 1 April 2009
PDF: 8 pages
J. Micro/Nanolith. 8(2) 021114 doi: 10.1117/1.3100208
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 2
Show Author Affiliations
Jui-Che Tsai, National Taiwan Univ. (Taiwan)
Ren-Jie Lai, National Taiwan Univ. (Taiwan)
Chun-Yi Yin, National Taiwan Univ. (Taiwan)
Dian-Sheng Chen, National Taiwan Univ. (Taiwan)
Ching-Kai Shen, National Taiwan Univ. (Taiwan)
Yao-Tien Chang, National Taiwan Univ. (Taiwan)


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