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Journal of Micro/Nanolithography, MEMS, and MOEMS

Ohmic series radio-frequency microelectromechanical system switch with corrugated diaphragm
Author(s): Feixiang Ke; Jianmin Miao; Zhihong Wang
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Paper Abstract

We present an ohmic series radio-frequency microelectromechanical system (RF MEMS) switch based on a moveable corrugated diaphragm that activates switch contact. Corrugation technology is introduced in the SiO2/Si3N4 diaphragm for reducing the residual stress in the diaphragm. Moreover, a multilayer metallization system containing ruthenium/gold is proposed as a contact metal to address the reliability of the switch contact. The concept of the corrugated diaphragm, together with a ruthenium/gold contact-metal system, is proven by the characterization of fabricated RF MEMS switches to be an effective way to realize reliable electric contact with significantly reduced pull-in voltage. The durability of the switch contact is increased significantly with the introduction of the multilayer metal, compared to a pure gold contact.

Paper Details

Date Published: 1 April 2009
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 8(2) 021122 doi: 10.1117/1.3100204
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 2
Show Author Affiliations
Feixiang Ke, Nanyang Technological Univ. (Singapore)
Jianmin Miao, Nanyang Technological Univ. (Singapore)
Zhihong Wang, Nanyang Technological Univ. (Singapore)

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