Share Email Print

Journal of Micro/Nanolithography, MEMS, and MOEMS

Ohmic series radio-frequency microelectromechanical system switch with corrugated diaphragm
Author(s): Feixiang Ke; Jianmin Miao; Zhihong Wang
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We present an ohmic series radio-frequency microelectromechanical system (RF MEMS) switch based on a moveable corrugated diaphragm that activates switch contact. Corrugation technology is introduced in the SiO2/Si3N4 diaphragm for reducing the residual stress in the diaphragm. Moreover, a multilayer metallization system containing ruthenium/gold is proposed as a contact metal to address the reliability of the switch contact. The concept of the corrugated diaphragm, together with a ruthenium/gold contact-metal system, is proven by the characterization of fabricated RF MEMS switches to be an effective way to realize reliable electric contact with significantly reduced pull-in voltage. The durability of the switch contact is increased significantly with the introduction of the multilayer metal, compared to a pure gold contact.

Paper Details

Date Published: 1 April 2009
PDF: 6 pages
J. Micro/Nanolith. 8(2) 021122 doi: 10.1117/1.3100204
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 2
Show Author Affiliations
Feixiang Ke, Nanyang Technological Univ. (Singapore)
Jianmin Miao, Nanyang Technological Univ. (Singapore)
Zhihong Wang, Nanyang Technological Univ. (Singapore)

© SPIE. Terms of Use
Back to Top