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Optical Engineering

Measurement of the vibrating shape of a bimorph deformable mirror using a laser displacement sensor
Author(s): Shin Oya
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Paper Abstract

A method to characterize the vibrating shape of a bimorph deformable mirror by measurement using a laser displacement sensor is presented. The displacement of the deformable mirror surface at a point is recorded as a frequency response function. The surface profile is synthesized from the response functions obtained at multiple points on a deformable mirror by postprocessing. The method has a wide frequency range and high-frequency resolution, suitable to investigate the resonance behavior of a deformable mirror. Although the spatial resolution is low compared with an interferometer, it is sufficient to identify low-spatial-order shapes at resonance frequencies. The accuracy of the displacement measurement is estimated to be comparable with interferometric data.

Paper Details

Date Published: 1 March 2009
PDF: 5 pages
Opt. Eng. 48(3) 033601 doi: 10.1117/1.3095904
Published in: Optical Engineering Volume 48, Issue 3
Show Author Affiliations
Shin Oya, National Astronomical Observatory of Japan/Subaru Telescope (United States)


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