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Journal of Micro/Nanolithography, MEMS, and MOEMS

Development of 2.4-GHz film bulk acoustic wave filter for wireless communication
Author(s): Chi-Ming Fang; Shih-Yung Pao; Chi-Yuan Lee; Yi-Chang Lu; Pei-Yen Chen; Yung-Chung Chin; Pei-Zen Chang
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Paper Abstract

This research shows the realization of 2.4-GHz film bulk acoustic wave (FBAW) filters. The design, simulation, fabrication, measurement, and analysis of the film bulk acoustic wave resonator (FBAR) devices are covered, which is helpful for the manufacture of the FBAR devices. The simulation of the FBAR and RF circuitry can be integrated on a single platform. The fabrication of the FBAW filters is compatible with complementary metal-oxide semiconductors. This device can be used in 2.4-GHz bandpass filters, such as 802.11b/g and Bluetooth. In this research, the 2.4-GHz FBAW filters for wireless communication have been accomplished. The fabricated FBAW filters have insertion loss of −10 dB, return loss of −7 dB, and stopband rejection of −25 dB, central frequency of 2.485 GHz, bandwidth of 60 MHz, and size of 0.5 mm×0.5 mm.

Paper Details

Date Published: 1 April 2009
PDF: 7 pages
J. Micro/Nanolith. 8(2) 021121 doi: 10.1117/1.3094749
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 2
Show Author Affiliations
Chi-Ming Fang, National Taiwan Univ. (Taiwan)
Shih-Yung Pao, National Taiwan Univ. (Taiwan)
Chi-Yuan Lee, Yuan Ze Univ. (Taiwan)
Yi-Chang Lu, Asia Pacific Microsystems, Inc. (Taiwan)
Pei-Yen Chen, Chung-Shan Institute of Science and Technology (Taiwan)
Yung-Chung Chin, TXC Corp. (Taiwan)
Pei-Zen Chang, National Taiwan Univ. (Taiwan)

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