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Journal of Micro/Nanolithography, MEMS, and MOEMS

Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm
Author(s): Bahram Azizollah Ganji; Burhanuddin Yeop Majlis
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Paper Abstract

A novel single-chip microelectromechanical systems (MEMS) capacitive microphone with a slotted diaphragm for sound sensing is developed to minimize the microphone size and improve the sensitivity by decreasing the mechanical stiffness of the diaphragm. According to the results, a clamped microphone with a 2.43×2.43-mm2 diaphragm and a slotted one with a 1.5-×1.5-mm2 diaphragm have the same mechanical sensitivity, but the size of slotted microphone is at least 1.62 times smaller than clamped structure. The results also yield a sensitivity of 5.33×10−6 pF/Pa for the clamped and 3.87×10−5 pF/Pa for the slotted microphone with a 0.5×0.5-mm2 diaphragm. The sensitivity of the slotted diaphragm is increased 7.27 times. The calculated pull-in voltage of the clamped microphone is 214 V, the measured pull-in voltage of the slotted one is 120 V. The pull-in voltage of the slotted microphone is about 50% decreased.

Paper Details

Date Published: 1 April 2009
PDF: 7 pages
J. Micro/Nanolith. 8(2) 021112 doi: 10.1117/1.3091941
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 2
Show Author Affiliations
Bahram Azizollah Ganji
Burhanuddin Yeop Majlis, Univ. Kebangsaan Malaysia (Malaysia)


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