Share Email Print

Journal of Micro/Nanolithography, MEMS, and MOEMS

Electrothermal micromirror with dual-reflective surfaces for circumferential scanning endoscopic imaging
Author(s): Lei Wu; Huikai Xie
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We report the design, fabrication, and measurements of a dual-reflective, single-crystal silicon-based micromirror that can perform circumferential scanning for endoscopic optical coherence tomography (EOCT). Full 360-deg optical scan angle (OSA) can be achieved by using a dual-reflective mirror with ±45-deg (or 90-deg) mechanical scan angle (MSA), where each reflective mirror surface contributes a 180-deg optical scanning. A novel surface- and bulk-combined micromachining process based on silicon on insulator (SOI) wafers is developed for fabricating the dual-reflective micromirror. The mirror flatness is maintained by the single-crystal-silicon device layer of SOI wafers, and aluminum is coated on both sides for reflection. A fabricated device demonstrated about half circumferential scanning range at resonance of 425 Hz. Other measured data include the radii of curvature, −129 mm (front surface) and 132 mm (back surface), and the reflectance, 86.3% (front surface) and 84.2% (back surface). This micromirror has the potential to realize full-circumferential-scanning EOCT imaging.

Paper Details

Date Published: 1 January 2009
PDF: 7 pages
J. Micro/Nanolith. 8(1) 013030 doi: 10.1117/1.3082186
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 8, Issue 1
Show Author Affiliations
Lei Wu, Univ. of Florida (United States)
Huikai Xie, Univ. of Florida (United States)

© SPIE. Terms of Use
Back to Top