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Optical Engineering

Ronchi test with variable-frequency rulings
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Paper Abstract

We present a new method for testing an optical surface. It uses the Ronchi test with variable-frequency rulings and a liquid-crystal display. The rulings can be formed by substructuring the spacing of a Ronchi ruling or combining several classical Ronchi rulings in a single variable-frequency ruling. This change allows us to observe smaller defects on the surface, because it enlarges the spatial-frequency domain of the ruling, and a larger dynamic range of detection of the Ronchi test can be obtained instead of increasing the resolution of the detection of the Ronchi test by iteratively changing classical Ronchi rulings with higher line density. As a result, we have found that it is possible to measure defects on a optical surface that are of size ≥ 57 nm (λ/11).

Paper Details

Date Published: 1 January 2009
PDF: 7 pages
Opt. Eng. 48(1) 013604 doi: 10.1117/1.3072956
Published in: Optical Engineering Volume 48, Issue 1
Show Author Affiliations
Javier Salinas-Luna, Univ. de Guadalajara (Mexico)
FermIn-Solomon Granados-AgustIn, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
Alejandro Cornejo Rodriguez, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
Esteban A. Luna-Aguilar, Univ. Nacional Autónoma de México (Mexico)
Juan Jaime Sanchez-Escobar, Univ. de Guadalajara (Mexico)
Juan Manuel Hernández-Cid, Univ. de Guadalajara (Mexico)


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