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Optical Engineering

Nano-roughness measurements with a modified Linnik microscope and the uses of full-field heterodyne interferometry
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Paper Abstract

A collimated heterodyne light enters a modified Linnik microscope, and the full-field interference signals are taken by a fast CMOS camera. The sampling intensities recorded at each pixel are fitted to derive a sinusoidal signal, and its phase can be obtained. Next, the 2-D phase unwrapping technique is applied to derive the 2-D phase distribution. Then, Ingelstam's formula is used to calculate the height distribution. Last, the height distribution is filtered with the Gaussian filter, the roughness topography and its average roughness can be obtained and its validity is demonstrated.

Paper Details

Date Published: 1 December 2008
PDF: 5 pages
Opt. Eng. 47(12) 125601 doi: 10.1117/1.3050357
Published in: Optical Engineering Volume 47, Issue 12
Show Author Affiliations
Yen-Liang Chen, National Chiao Tung Univ. (Taiwan)
Zhi-Cheng Jian, National Chiao Tung Univ. (Taiwan)
Hung-Chih Hsieh, National Chiao Tung Univ. (Taiwan)
Wang-Tsung Wu, National Chiao Tung Univ. (Taiwan)
Der-Chin Su, National Chiao Tung Univ. (Taiwan)

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