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Journal of Micro/Nanolithography, MEMS, and MOEMS

Slow scanning electromagnetic scanner for laser display
Author(s): Hee-Moon Jeong; Yong-Hwa Park; Yong-Chul Cho; Jun-Sik Hwang; Seok-Mo Chang; Seok-Jin Kang; Hyun-Ku Jeong; Jun-O Kim; Jin-Ho Lee
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Paper Abstract

A small sized, low power consuming, shock proven optical scanner with a capacitive comb-type rotational sensor for the application of mobile projection display is designed, fabricated, and characterized. To get a 2-D video image, the present device horizontally scans a vertical line image made through a line-type diffractive spatial optical modulator. To minimize, device size as well as power consumption, the mirror surface is placed on the opposite side of the coil actuator. To prevent thermal deformation of the mirror, the mirror is partially connected to the center point of the coil actuator. To be shock proof, mechanical stoppers are constructed in the device. The scanner is fabricated from two silicon wafers and one glass wafer using bulk micromachining technology. The packaged scanner consists of the scanner chip, a pair of magnets, yoke rim, and base plate. The fabricated package size is 9.2×10×3 mm (0.28 cc) and the mirror size is 3×1.5 mm. The scanner chip receives no damage under the shock test with an impact of 2000 G in 1 ms. In the case of a full optical scan angle of 30 deg at 120-Hz driving frequency, linearity, repeatability, and power consumption are measured at 98%, 0.013 deg, and 60 mW, respectively, which are suitable for mobile display applications.

Paper Details

Date Published: 1 October 2008
PDF: 13 pages
J. Micro/Nanolith. 7(4) 043003 doi: 10.1117/1.3033210
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 4
Show Author Affiliations
Hee-Moon Jeong, Samsung Electronics Co., Ltd. (Korea, Republic of)
Yong-Hwa Park, Samsung Advanced Institute of Technology (Korea, Republic of)
Yong-Chul Cho, Samsung Advanced Institute of Technology (Korea, Republic of)
Jun-Sik Hwang, Samsung Advanced Institute of Technology (Korea, Republic of)
Seok-Mo Chang, Samsung Electronics Co., Ltd. (Korea, Republic of)
Seok-Jin Kang, Samsung Electronics Co., Ltd. (Korea, Republic of)
Hyun-Ku Jeong, Samsung Electronics Co., Ltd. (Korea, Republic of)
Jun-O Kim, Samsung Electronics Co., Ltd. (Korea, Republic of)
Jin-Ho Lee, Samsung Electronics Co., Ltd. (Korea, Republic of)


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