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Optical Engineering

Techniques for fabrication of large-size graded reflectivity mirrors
Author(s): Guonuan Lv; Chaoyang Wei; Dawei Li; Jianbing Huang; Kui Yi
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Paper Abstract

According to the parameter requirements of a graded reflectivity mirror with a Gaussian profile, the layer structure and the mask pattern are designed using a graded-thickness middle layer. The mask and the automatic mask-switchover equipment are designed considering the actual requirement of the thin films and the specific deposit facility. The uniformity of the layer thickness is analyzed. The measurement results indicate that samples prepared with this technique are basically in accordance with the design parameter. The scattering effect between the material molecules and the mask, thickness errors, and the alignment error between the mask and the substrate are the main factors that influence the deposit result.

Paper Details

Date Published: 1 December 2008
PDF: 4 pages
Opt. Eng. 47(12) 123401 doi: 10.1117/1.3027595
Published in: Optical Engineering Volume 47, Issue 12
Show Author Affiliations
Guonuan Lv, Shanghai Institute of Optics and Fine Mechanics (China)
Chaoyang Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Dawei Li, Shanghai Institute of Optics and Fine Mechanics (China)
Jianbing Huang, Shanghai Institute of Optics and Fine Mechanics (China)
Kui Yi, Shanghai Institute of Optics and Fine Mechanics (China)


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