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Journal of Micro/Nanolithography, MEMS, and MOEMS

In-plane rotary comb-drive actuator for a variable optical attenuator
Author(s): Max Ti-Kuang Hou; Jing-Yi Huang; Shiue-Shr Jiang; Jer-Liang Andrew Yeh
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Paper Abstract

An in-plane rotary comb drive actuator was designed for variable optical attenuators (VOAs) that achieved large attenuation with fast response at low driving voltage. Actuator performance was improved by using a higher density of comb fingers for a smaller moment of inertia, serpentine flexure springs for a larger rotational angle, and symmetric spring arrangement for a higher radial shock resistance. A rotation of a tilted reflective mirror was used to further enhance the optical attenuation of VOA. The actuator, proposed with the size of 2 mm × 2 mm, achieved the bandwidth of 350 Hz and the deflection angle of 2.5 deg at 5 V, resulting in the maximum attenuation of 57 dB.

Paper Details

Date Published: 1 October 2008
PDF: 6 pages
J. Micro/Nanolith. 7(4) 043015 doi: 10.1117/1.3013547
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 4
Show Author Affiliations
Max Ti-Kuang Hou, National United Univ. (Taiwan)
Jing-Yi Huang, National Tsing Hua Univ. (Taiwan)
Shiue-Shr Jiang, National Tsing Hua Univ. (Taiwan)
Jer-Liang Andrew Yeh, National Tsing Hua Univ. (Taiwan)


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