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Journal of Micro/Nanolithography, MEMS, and MOEMS

Design and characterization of a microheater array device fabricated with SwIFT-LiteTM
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Paper Abstract

A microheater array device is designed and fabricated using the SwIFT-LiteTM process at Sandia National Laboratories. The device contains 18 individually controllable microheaters in a 3×6 array on a silicon substrate. The microheater array device was designed for use as a biosensor platform with a waveguide for real-time detection of DNA hybridization and melting as well as microfluidics for sample delivery. The design process including modeling, fabrication, and characterization of the heaters and waveguide is detailed. A FRET (florescence resonance energy transfer) system for DNA melting experiments is described, and the associated surface chemistry and microfluidic systems are discussed.

Paper Details

Date Published: 1 October 2008
PDF: 10 pages
J. Micro/Nanolith. 7(4) 043035 doi: 10.1117/1.3013457
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 4
Show Author Affiliations
Layne D. Williams, The Univ. of Utah (United States)
Murat Okandan, Sandia National Labs. (United States)
Steve Blair, The Univ. of Utah (United States)


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