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Journal of Micro/Nanolithography, MEMS, and MOEMS

Low-friction large step-size micromotor driven by a scratch-drive actuator with bounceback mechanism
Author(s): I-Yu Huang; Guan-Ming Chen; Yen-Chi Lee
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Paper Abstract

This study presents a rotary micromotor with low-friction and large-step displacement driven by a scratch drive actuator (SDA) with bounceback driving mechanism. The present SDA device has a shorter plate and wider bushing compared to those of the existing SDA, resulting in a new electrostatic scratch-and-bounceback driving mechanism with larger stepping size. The new scratch-and-bounceback actuating mechanism markedly reduces the friction and damping effect between the SDA plate and the nitride insulator surface and eliminates effectively the sudden reverse rotation of SDA-based micro rotary motor. This investigation incorporated three design features (corners-rounded supporting-beam, flanged cover, and corrugated/ribbed/dimpled inside ring) into the structure of a SDA-based rotary micromotor to further decrease the rotating abrasion between the rotor inside ring and the cover, the anchor, and the inside rail. The bouncing SDA-based micromotors developed in this work (with 398 µm diam) were fabricated using the MEMSCAP® Poly-MUMPs process and achieved many improvements, including low friction, large stepping size (196 nm), small damping effect, and no sudden reverse rotation phenomenon (from dc to 25 kHz).

Paper Details

Date Published: 1 October 2008
PDF: 9 pages
J. Micro/Nanolith. 7(4) 043026 doi: 10.1117/1.3010878
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 4
Show Author Affiliations
I-Yu Huang, National Sun Yat-sen Univ. (Taiwan)
Guan-Ming Chen, National Sun Yat-sen Univ. (Taiwan)
Yen-Chi Lee, National Sun Yat-sen Univ. (Taiwan)


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