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Optical Engineering

Fabrication, characterization, and optimization of an ultraviolet silicon sensor
Author(s): Dainet Berman Mendoza; M. Aceves-Mijares; Luís Raúl Berriel-Valdos; Jorge Pedraza; Alicia Vera-Marquina
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Paper Abstract

This work shows the design, fabrication, and optimization of a silicon sensor with an extended sensing range toward the UV region. The main characteristic of this detector is the enlargement of the common silicon detection range to the ultraviolet region (240 to 400 nm). The fabrication process of this detector is compatible with complementary metal oxide semiconductor (CMOS) silicon technology, which makes it cheaper than commercial UV detectors.

Paper Details

Date Published: 1 October 2008
PDF: 5 pages
Opt. Eng. 47(10) 104001 doi: 10.1117/1.3000434
Published in: Optical Engineering Volume 47, Issue 10
Show Author Affiliations
Dainet Berman Mendoza, Univ. de Sonora (Mexico)
M. Aceves-Mijares, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
Luís Raúl Berriel-Valdos, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
Jorge Pedraza, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
Alicia Vera-Marquina

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