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Optical Engineering

Saddle-point construction in the design of lithographic objectives, part 2: application
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Paper Abstract

Optical designers often insert or split lenses in existing designs. Here, we apply in the design of objectives for deep and extreme UV lithography an alternative method for adding new components that consists of constructing saddle points in the optical merit function landscape and obtaining new local minima from them. The design examples show that this remarkably simple method can be easily integrated with traditional design techniques. The new method has significantly improved our design productivity in all cases in which we have applied it so far. High-quality designs of lithographic objectives are obtained with this method.

Paper Details

Date Published: 1 September 2008
PDF: 4 pages
Opt. Eng. 47(9) 093003 doi: 10.1117/1.2981513
Published in: Optical Engineering Volume 47, Issue 9
Show Author Affiliations
Oana Marinescu, Technische Univ. Delft (Netherlands)
Florian Bociort, Technische Univ. Delft (Netherlands)


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