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Journal of Micro/Nanolithography, MEMS, and MOEMS

Fabrication of quartz mold with submicrometer features based on laser-assisted contact transfer method
Author(s): Yung-Chun Lee; Chun-Hsiang Chen; Cheng-Yu Chiu; Fuh-Yu Chang
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Paper Abstract

We report a simple method for fabricating quartz molds with submicrometer- and nanoscaled surface structures. It utilizes an excimer laser as the energy source and a roller-type contact-printing setup for directly transferring a patterned metallic thin film from a silicon mold to a quartz substrate. The transferred metallic patterns are subsequently used as an etching mask for dry etching on the quartz plate. Experiments have been carried out to determine the optimal parameters for successful pattern transformation. Experimental results on fabricating quartz molds are presented, and potential applications of this innovative pattern transformation method are addressed.

Paper Details

Date Published: 1 July 2008
PDF: 6 pages
J. Micro/Nanolith. 7(3) 033006 doi: 10.1117/1.2970146
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 3
Show Author Affiliations
Yung-Chun Lee, National Cheng Kung Univ. (Taiwan)
Chun-Hsiang Chen, National Cheng Kung Univ. (Taiwan)
Cheng-Yu Chiu, National Cheng Kung Univ. (Taiwan)
Fuh-Yu Chang, Industrial Technology Research Institute (Taiwan)

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