Share Email Print
cover

Journal of Micro/Nanolithography, MEMS, and MOEMS

Novel two-dimensional micromachined accelerometer based on thermocapillary heat transfer
Author(s): Ke-Min Liao; Rongshun Chen
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We report a novel prototype of a two-dimensional micromachined accelerometer based on thermocapillary heat transfer. The only moving element in this accelerometer is a thermal bubble generated by vaporizing the working liquid in the microchamber. The accelerometer consists of two key components, a heating resistor for creating symmetrical temperature profiles and two pairs of temperature detectors placed symmetrically and orthogonally to each other. The prototype devices demonstrate that a sensitivity of 1.5°C/g for an operating power of 60 mW can be realized. The frequency response of the accelerometer containing deionized water is 200 Hz, and the corresponding noise equivalent acceleration is ~1 mg/Hz1/2.

Paper Details

Date Published: 1 July 2008
PDF: 6 pages
J. Micro/Nanolith. 7(3) 033011 doi: 10.1117/1.2959849
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 3
Show Author Affiliations
Ke-Min Liao, National Tsing Hua Univ. (Taiwan)
Rongshun Chen, National Tsing Hua Univ. (Taiwan)


© SPIE. Terms of Use
Back to Top