Journal of Micro/Nanolithography, MEMS, and MOEMSNovel two-dimensional micromachined accelerometer based on thermocapillary heat transfer
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We report a novel prototype of a two-dimensional micromachined accelerometer based on thermocapillary heat transfer. The only moving element in this accelerometer is a thermal bubble generated by vaporizing the working liquid in the microchamber. The accelerometer consists of two key components, a heating resistor for creating symmetrical temperature profiles and two pairs of temperature detectors placed symmetrically and orthogonally to each other. The prototype devices demonstrate that a sensitivity of 1.5°C/g for an operating power of 60 mW can be realized. The frequency response of the accelerometer containing deionized water is 200 Hz, and the corresponding noise equivalent acceleration is ~1 mg/Hz1/2.