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Journal of Micro/Nanolithography, MEMS, and MOEMS

Novel InP-based optical MEMS device
Author(s): Cho Jui Tay; Ramam Akkipeddi; M. Gopal
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Paper Abstract

We present a method for the design and fabrication of InP-based free-standing microelectromechanical systems structures, which include microcantilever beams and Fabry–Perot membranes. The membrane is designed to satisfy both mechanical and optical requirements for a wavelength division multiplexing device and micro-Raman spectroscopy technique is used to evaluate surface stresses. The membrane profile is measured using a white-light interferometry technique, and the effect of the structure geometry on residual stress formation is discussed. From the results obtained, we propose a novel filter design that shows minimum surface profile deviation and stresses.

Paper Details

Date Published: 1 July 2008
PDF: 8 pages
J. Micro/Nanolith. 7(3) 033016 doi: 10.1117/1.2959175
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 3
Show Author Affiliations
Cho Jui Tay, National Univ. of Singapore (Singapore)
Ramam Akkipeddi, Institute of Materials Research and Engineering (Singapore)
M. Gopal, National Univ. of Singapore (Singapore)

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