Share Email Print
cover

Optical Engineering

Well-conditioned multiple laser Mueller matrix ellipsometer
Author(s): Frantz Stabo-Eeg; Morten Kildemo; Ingar Nerbo; Mikael Lindgren
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We report on the design and performance test of a multiple laser Mueller matrix ellipsometer (MME). The MME is well conditioned due to the integration of the recently reported achromatic 132-deg compensators based on biprisms, in combination with high-quality Glan-Thompson polarizers. The system currently operates between 300 and 2700 nm, without the need to change any optical components except for the detector. Four lasers are employed as light sources (405, 532, 633, and 1570 nm) to test the performance in both reflection and transmission modes. Thus, the system is used to determine the Mueller matrices and associated optical constants of known optical systems: 1. optical rotatory power of D-glucose in solution, 2. reflection of a native oxide c-Si wafer, and 3. the properties of a liquid crystal spatial light modulator. The results show that the system matrices of the MME have condition numbers between the optimal √3 and 2 during operation, resulting in small experimental errors. To the best of our knowledge, there is no other MME reported with such good conditioning over a comparably wide spectral range.

Paper Details

Date Published: 1 July 2008
PDF: 9 pages
Opt. Eng. 47(7) 073604 doi: 10.1117/1.2957047
Published in: Optical Engineering Volume 47, Issue 7
Show Author Affiliations
Frantz Stabo-Eeg, Norges Teknisk-Naturvitenskapelige Univ. (Norway)
Morten Kildemo, Norges Teknisk-Naturvitenskapelige Univ. (Norway)
Ingar Nerbo, Norges Teknisk-Naturvitenskapelige Univ. (Norway)
Mikael Lindgren, Norges Teknisk-Naturvitenskapelige Univ. (Norway)


© SPIE. Terms of Use
Back to Top