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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

What Can Semiconductor Fabs Do for the Green Earth?
Author(s): Burn Jeng Lin

Paper Abstract

This PDF file contains the editorial “What Can Semiconductor Fabs Do for the Green Earth?” for JM3 Vol. 7 Issue 02

Paper Details

Date Published: 1 April 2008
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J. Micro/Nanolith. MEMS MOEMS 7(2) 020101 doi: 10.1117/1.2951889
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 2
Show Author Affiliations
Burn Jeng Lin, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)


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