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Optical Engineering

Simultaneous phase-shifting ellipsometry based on grating beamsplitter
Author(s): Kun Yang; Aijun Zeng; Xiangzhao Wang; Feng Tang; Hua Wang
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Paper Abstract

Simultaneous phase-shifting ellipsometry based on a grating beamsplitter is presented. In the corresponding setup, an orthogonal grating and analyzer array are used. The latter is composed of four separate analyzers arranged in a 2×2 grid, the polarization axes of which are set to 0, 45, 90, and 135 deg. A mask allows only four diffracted beams of the fist order, having the same optical intensities, to pass. Each beam is incident on one of the analyzers of the array. The intensities of the four beams are simultaneously detected by a quadrant detector. The ellipsometric parameters are obtained using the four intensity signals. The feasibility of simultaneous phase shifting ellipsometry is thus demonstrated.

Paper Details

Date Published: 1 June 2008
PDF: 5 pages
Opt. Eng. 47(6) 063602 doi: 10.1117/1.2948360
Published in: Optical Engineering Volume 47, Issue 6
Show Author Affiliations
Kun Yang, Shanghai Institute of Optics and Fine Mechanics (China)
Aijun Zeng, Shanghai Institute of Optics and Fine Mechanics (China)
Xiangzhao Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Feng Tang, Shanghai Institute of Optics and Fine Mechanics (China)
Hua Wang, Shanghai Institute of Optics and Fine Mechanics (China)


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