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Optical Engineering

Fast-response photoconductive metal-semiconductor-metal ultraviolet detector based on ZnO film grown by radio-frequency magnetron sputtering
Author(s): Xuming Bian; Jingwen Zhang; Zhen Bi; Dong Wang; Xin'an Zhang; Xun Hou
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Paper Abstract

ZnO thin films were grown on SiO2/Si substrates by radio-frequency magnetron sputtering. Based on the ZnO film, a photoconductive metal-semiconductor-metal ultraviolet detector was fabricated by a liftoff technique. Its I-V characteristics were observed at 365 nm, and a fast response was observed by illumination with a KrF excimer laser.

Paper Details

Date Published: 1 June 2008
PDF: 4 pages
Opt. Eng. 47(6) 064001 doi: 10.1117/1.2939091
Published in: Optical Engineering Volume 47, Issue 6
Show Author Affiliations
Xuming Bian, Xi'an Jiaotong Univ. (China)
Jingwen Zhang, Xi'an Jiaotong Univ. (China)
Zhen Bi, Xi'an Jiaotong Univ. (China)
Dong Wang, Xi'an Jiaotong Univ. (China)
Xin'an Zhang, Xi'an Jiaotong Univ. (China)
Xun Hou, Xi'an Jiaotong Univ. (China)

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