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Optical Engineering

Planar refractive microlens arrays in indium phosphide and quartz substrates
Author(s): Xinyu Zhang; Changsheng Xie; An Ji; Qingle Tang; Wei Luo
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Paper Abstract

Large-area concave refractive microlens arrays, or concave template structures, and then the non-refractive-index-gradient type of planar refractive microlens arrays in InP and quartz substrates, are fabricated utilizing the method consisting of conventional UV photolithography, thermal shaping of concave photoresist microlenses, etching with an argon ion beam of large diameter, and filling or growing optical medium structures onto the curved surfaces of preshaped concave templates. Several key conditions for fabricating concave and also planar microlenses are discussed in detail. The concave structures obtained are characterized by scanning electron microscope and surface profile measurements. The far-field optical characteristics of quartz/ZrO2 planar refractive microlens arrays have been acquired experimentally.

Paper Details

Date Published: 1 May 2008
PDF: 15 pages
Opt. Eng. 47(5) 054001 doi: 10.1117/1.2931076
Published in: Optical Engineering Volume 47, Issue 5
Show Author Affiliations
Xinyu Zhang, Huazhong Univ. of Science and Technology (China)
Changsheng Xie, Huazhong Univ. of Science and Technology (China)
An Ji, Institute of Semiconductors (China)
Qingle Tang
Wei Luo

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