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Optical Engineering

Design, fabrication, and test of soft x-ray sinusoidal transmission grating
Author(s): Min Zhao; Xiaoli Zhu; Baoqin Chen; Changqing Xie; Min Liu; Jiebing Niu; Longyu Kuang; Leifeng Cao
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Paper Abstract

We present a novel diffractive optical element, the quantum dot array diffraction grating (QDADG), used in soft x-ray spectroscopy. Because of its sinusoidal transmission it effectively suppress higher order diffractions, which can improve the precision and SNR of soft x-ray spectroscopy in laser plasma diagnosis. There are, however, many difficulties in the fabrication of a soft x-ray spectroscopy QDADG because of its small dimensions and complex pattern. We propose a hybrid lithography to fabricate a QDADG, including electron-beam lithography and x-ray lithography. The diffraction property of the QDADG is also proved to be consistent with a theoretical prediction using experiments.

Paper Details

Date Published: 1 May 2008
PDF: 5 pages
Opt. Eng. 47(5) 058001 doi: 10.1117/1.2919717
Published in: Optical Engineering Volume 47, Issue 5
Show Author Affiliations
Min Zhao, Institute of Microelectronics (China)
Xiaoli Zhu, Institute of Microelectronics (China)
Baoqin Chen, Institute of Microelectronics (China)
Changqing Xie, Institute of Microelectronics (China)
Min Liu, Institute of Microelectronics (China)
Jiebing Niu, Institute of Microelectronics (China)
Longyu Kuang, China Academy of Engineering Physics (China)
Leifeng Cao, China Academy of Engineering Physics (China)


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