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Journal of Micro/Nanolithography, MEMS, and MOEMS

Silicon-Based MOEMS and Their Applications
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J. Micro/Nanolith. 7(2) 020901 doi: 10.1117/1.2913329
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 7, Issue 2, April 2008
Show Author Affiliations
Harald Schenk, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Wibool Piyawattanametha, King Mongkut's Institute of Technology Ladkrabang (Thailand)


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