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Optical Engineering

Sensitivity dependence with respect to diaphragm thickness in guided-wave optical pressure sensor based on elasto-optic effect
Author(s): Hiroyuki Nikkuni; Yu Watanabe; Masashi Ohkawa; Takashi Sato
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Paper Abstract

We experimentally investigated the relationship between sensitivity and diaphragm thickness in a glass-based guided-wave optical pressure sensor using intermodal interference between the fundamental TM-like and TE-like modes. The sensor consists of a rectangular diaphragm and a straight single-mode waveguide on the diaphragm. The sensitivity is theoretically known to be inversely proportional to the square of the diaphragm thickness. In this study, to examine this relationship, four sensors with diaphragm thicknesses of 0.30 mm, 0.22 mm, 0.20 mm, and 0.15 mm were fabricated. The area of the diaphragm was 10 mm×10 mm. For the waveguide position nearest to the center of the diaphragm, the measured sensitivities almost agreed with the theoretical ones.

Paper Details

Date Published: 1 April 2008
PDF: 5 pages
Opt. Eng. 47(4) 044402 doi: 10.1117/1.2909669
Published in: Optical Engineering Volume 47, Issue 4
Show Author Affiliations
Hiroyuki Nikkuni, Niigata Univ. (Japan)
Yu Watanabe, Niigata Univ. (Japan)
Masashi Ohkawa, Niigata Univ. (Japan)
Takashi Sato, Niigata Univ. (Japan)

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